TITANIUM SILICIDE

TITANIUM SILICIDE Basic information

Product Name:	TITANIUM SILICIDE
Synonyms:	TITANIUM SILICIDE;pentatitanium trisilicide;Titanium silicide, ti5si3;silicon:titanium;Cadmium Telluride (CdTe) Sputtering Targets
CAS:	12067-57-1
MF:	Si3Ti5
MW:	323.59
EINECS:	235-082-9
Product Categories:
Mol File:	12067-57-1.mol

TITANIUM SILICIDE Chemical Properties

Melting point	2130°C
density	4.3 g/cm3
form	-325 Mesh Powder
Water Solubility	Soluble in hydrofluoric acid. Insoluble in water.
EPA Substance Registry System	Titanium silicide (Ti5Si3) (12067-57-1)

Safety Information

MSDS Information

Provider	Language
ALFA	English

TITANIUM SILICIDE Usage And Synthesis

Chemical Properties	-325 mesh gray powder(s) [AES93]
Uses	It is used as source, gate and drain contacts and local interconnections in CMOS integrated circuits. it is used in the C54 phase.

TITANIUM SILICIDE Preparation Products And Raw materials

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