ChemicalBook Product Catalog Inorganic chemistry Inorganic salts Silicide and silicates TANTALUM SILICIDE

TANTALUM SILICIDE

TANTALUM SILICIDE Basic information
Product Name:TANTALUM SILICIDE
Synonyms:TANTALUM SILICIDE;pentatantalum trisilicide;TANTALUM SILICIDE, 99.5% (METALS BASIS EXCLUDING NB), NB 0.1;Tantalumsilicide,99.5%(metalsbasisexcludingNb),Nb0.1-1%;Einecs 235-081-3;silicon,tantalum;Nickel Chromium (Ni-Cr) Alloy Sputtering Targets
CAS:12067-56-0
MF:H4SiTa
MW:213.06
EINECS:235-081-3
Product Categories:
Mol File:12067-56-0.mol
TANTALUM SILICIDE Structure
TANTALUM SILICIDE Chemical Properties
EPA Substance Registry SystemTantalum silicide (Ta5Si3) (12067-56-0)
Safety Information
TSCA Yes
MSDS Information
ProviderLanguage
ALFA English
TANTALUM SILICIDE Usage And Synthesis
Chemical Properties-325 mesh powder(s); used as a 99.5 or 99.95% material as a sputtering target in the fabrication of integrated circuits [ALF93] [CER91]
TANTALUM SILICIDE Preparation Products And Raw materials
Aluminum acetylacetonate TRIS(2,2,6,6-TETRAMETHYL-3,5-HEPTANEDIONATO)EUROPIUM(III) N-BUTYLISOCYANIDE PHENYLSELENOL Tris(2,4-pentanedionato)chroMiuM(III) DICHLORO(ETHYLENEDIAMINE)PLATINUM(II) SALCOMINE 2,4-PENTANEDIONE, SILVER DERIVATIVE 1,1,3,3-TETRAMETHYLBUTYL ISOCYANIDE Tosylmethyl isocyanide COBALT(II) ACETYLACETONATE Cupric acetylacetonate Ethyl isocyanoacetate TERT-BUTYL ISOCYANIDE Ferric acetylacetonate COBALT ETHYLENE DIAMINE CHLORIDE Benzyl isocyanide TRIS(2,2,6,6-TETRAMETHYL-3,5-HEPTANEDIONATO)DYSPROSIUM(III)
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