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| | TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM Basic information |
| Product Name: | TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM | | Synonyms: | HAFNIUM TETRAKIS(ETHYLMETHYLAMIDE), 99+%;Tetrakis(ethylmethylamino)hafnium 99.999%;Tetrakis(ethylMethylaMino)hafniuM, 99% (99.99+%-Hf, <0.15% Zr) PURATREM, 72-7720, contained in 50 Ml Swagelok cylinder (96-1070) for CVD/ALD;Tetrakis(ethylMethylaMido)hafniuM(IV) >=99.99% trace Metals basis;Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH;Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH PURATREM;Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH, PURATREM, 72-7720, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD;TEMAH: Hf[N(CH3)(CH2CH3)]4 | | CAS: | 352535-01-4 | | MF: | C12H32HfN4 | | MW: | 410.9 | | EINECS: | | | Product Categories: | ALD Precursors;metal amide complex | | Mol File: | 352535-01-4.mol |  |
| | TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM Chemical Properties |
| Melting point | <-50 °C | | Boiling point | 79 °C0.1 mm Hg(lit.) | | density | 1.324 g/mL at 25 °C(lit.) | | Fp | 52 °F | | storage temp. | 2-8°C | | form | liquid | | color | colorless to yellow | | Specific Gravity | 1.324 | | Hydrolytic Sensitivity | 9: reacts extremely rapidly with atmospheric moisture - may be pyrophoric - glove box or sealed system required | | Sensitive | Air & Moisture Sensitive | | EPA Substance Registry System | Ethanamine, N-methyl-, hafnium(4+) salt (4:1) (352535-01-4) |
| Hazard Codes | F,Xi | | Risk Statements | 11-14-36/37/38 | | Safety Statements | 16-26-36 | | RIDADR | UN 3398 4.3/PG 2 | | WGK Germany | 3 | | TSCA | No | | HazardClass | 4.3 | | PackingGroup | II | | HS Code | 2921199990 |
| | TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM Usage And Synthesis |
| | TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM Preparation Products And Raw materials |
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