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TETRAKIS(DIETHYLAMINO)TITANIUM

TETRAKIS(DIETHYLAMINO)TITANIUM Basic information
Description Reference
Product Name:TETRAKIS(DIETHYLAMINO)TITANIUM
Synonyms:TDEAT;TETRAKIS (DIETHYLAMIDO) TITANIUM;TETRAKIS(DIETHYLAMINO)TITANIUM;TETRAKIS DIETHYL AMINO TITANIUM (IV);TITANIUM (IV) DIETHYLAMIDE;TITANIUM TETRAKIS(DIETHYLAMIDE);Titanium, tetrakis(diethylamino)-;TETRAKIS(DIETHYLAMINO)TITANIUM, 99.999%
CAS:4419-47-0
MF:C16H40N4Ti
MW:336.38
EINECS:
Product Categories:metal amide complex
Mol File:4419-47-0.mol
TETRAKIS(DIETHYLAMINO)TITANIUM Structure
TETRAKIS(DIETHYLAMINO)TITANIUM Chemical Properties
Melting point 4 °C
Boiling point 112 °C0.1 mm Hg(lit.)
density 0.931 g/mL at 25 °C(lit.)
refractive index n20/D 1.536(lit.)
Fp -18 °F
storage temp. Store at +2°C to +8°C.
solubility Reacts with air.
form liquid
color yellow to orange
Specific Gravity0.95
Sensitive Moisture Sensitive
Hydrolytic Sensitivity8: reacts rapidly with moisture, water, protic solvents
BRN 3621431
CAS DataBase Reference4419-47-0(CAS DataBase Reference)
NIST Chemistry ReferenceTetrakis(diethylamino)titanium(4419-47-0)
EPA Substance Registry SystemEthanamine, N-ethyl-, titanium(4+) salt (4419-47-0)
Safety Information
Hazard Codes F,C,Xi
Risk Statements 11-14/15-34-36/37/38
Safety Statements 26-36/37/39-43-45-37/39-16
RIDADR UN 3398 4.3/PG 1
WGK Germany 3
F 10-21
TSCA Yes
HS Code 2921 19 50
HazardClass 4.3
PackingGroup II
MSDS Information
ProviderLanguage
ACROS English
SigmaAldrich English
ALFA English
TETRAKIS(DIETHYLAMINO)TITANIUM Usage And Synthesis
DescriptionTetrakis (diethylamino) titanium is useful Ti-source precusor. Tetrakis (diethylamino) titanium is useful in TiN film deposition using the atomic layer deposition method1,2. It is also a useful compound during the process of etching a layer of diamond like carbon.
Reference
  1. Kim, Ju Youn, et al. "Comparison of TiN Films Deposited Using Tetrakisdimethylaminotitanium and Tetrakisdiethylaminotitanium by the Atomic Layer Deposition Method." Japanese Journal of Applied Physics 42.7A (2003):4245-4248.
  2. Katamreddy, Rajesh, et al. "Ti source precursors for atomic layer deposition of TiO2, STO and BST." Ecs Transactions 16.4(2008):660-71.
  3. Shoemaker, Erika Leigh, et al. "Process for reactive ion etching a layer of diamond like carbon." US, US8409458. 2013.
Chemical PropertiesClear dark red liquid
UsesPrecursors Packaged for Depositions Systems
General DescriptionAtomic number of base material: 22 Titanium
Purification MethodsDissolve it in *C6H6, filter if a solid separates, evaporate under reduced pressure and distil it. It is an orange liquid which reacts violently with alcohols. [Bradley et al. J Chem Soc 3857 1960, Beilstein 4 IV 313.]
TETRAKIS(DIETHYLAMINO)TITANIUM Preparation Products And Raw materials
TETRAKIS(DIMETHYLAMINO)TIN Trityl tetrakis(pentafluorophenyl)borate TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV) TETRAKIS(ACETONITRILE)SILVER(I) TETRAFLUOROBORATE Tetrakis(triphenylphosphine)nickel TETRAKIS(DIMETHYLAMINO)TITANIUM TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM TETRAKIS(DIETHYLAMINO)ZIRCONIUM Vanadium tetrakis(dimethylamide) Germanium dimethylamide Tetrakis(triphenylphosphine)palladium TETRAKIS(DIETHYLAMINO)HAFNIUM TETRAKIS(DIMETHYLAMINO)ZIRCONIUM Tetrakis(ethylmethylamino)vanadium(IV) TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM TETRAKIS(ETHYLMETHYLAMINO)TITANIUM BIS(DIETHYLAMINO)BIS(DIMETHYLAMINO) TITANIUM, 99.99% TETRAKIS(DIETHYLAMINO)TITANIUM
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