(Trimethyl)methylcyclopentadienylplatinum(IV)

(Trimethyl)methylcyclopentadienylplatinum(IV) Basic information

Product Name:	(Trimethyl)methylcyclopentadienylplatinum(IV)
Synonyms:	Methylcyclopentadienyl trimethyl platinum;Trimethyl(methylcyclopentadienyl)platinum(IV) packaged for use in deposition systems;(Trimethyl)methylcyclopentadienylplatinum(IV), 99%, 78-1350, contained in 50 ml Swagelok cylinder for CVD/ALD;(TriMethyl)MethylcyclopentadienylplatinuM(IV),98%;(TriMethyl)MethylcyclopentadienylplatinuM(IV), 99%, 78-1350, contained in 50 Ml Swagelokcylinder high teMperature valve (96-1071) for CVD/ALD;(TriMethyl)MethylcyclopentadienylplatinuM(IV), 99%, 78-1350, contained in 50 Ml Swagelok cylinder (96-1070) for CVD/ALD;Trimethyl(methylcyclopentadienyl) platinium(IV) for synthesis;(Trimethyl)methylcyclopentadienylplatinum(IV), 99% (99.999%-Pt)
CAS:	94442-22-5
MF:	C9H9Pt
MW:	312.26
EINECS:	629-612-1
Product Categories:	Vapor Deposition Precursors;Precursors by Metal;Platinum;metallocene;ALD Precursors;Pt
Mol File:	94442-22-5.mol

(Trimethyl)methylcyclopentadienylplatinum(IV) Chemical Properties

Melting point	26-29 °C(lit.)
Boiling point	23°C 0,05mm
density	1.88
Fp	131 °F
storage temp.	2-8°C
form	Powder
color	off-white
Water Solubility	insoluble
Sensitive	Air Sensitive
Exposure limits	ACGIH: TWA 0.002 mg/m3 NIOSH: IDLH 4 mg/m3; TWA 0.002 mg/m3
CAS DataBase Reference	94442-22-5(CAS DataBase Reference)
EPA Substance Registry System	Platinum, trimethyl[(1,2,3,4,5-.eta.)-1-methyl-2,4-cyclopentadien-1-yl]- (94442-22-5)

Safety Information

Hazard Codes	Xi,N,T+
Risk Statements	36/37/38-50-43-27/28
Safety Statements	22-24/25-61-45-36/37-28
RIDADR	UN3467 - class 6.1 - PG 1 - EHS - Organometallic compound, toxic, solid, n.o.s., HI: all (not BR)
WGK Germany	3
TSCA	Yes
HS Code	28439000

MSDS Information

(Trimethyl)methylcyclopentadienylplatinum(IV) Usage And Synthesis

Uses	Platinum complex widely used in CVD and ALD applications due, in part, to its simplicity (only C,H and Pt), volatility and moderate decomposition temperatures.
Chemical Properties	white to off-white crystals or crystalline powder
Uses	Precursors Packaged for Depositions Systems
Uses	Trimethyl(methylcyclopentadienyl)platinum(IV) is used as an organometallic precursor for platinum. It is used in the microelectronics, catalysis, photonics and chemical sensing processes. It is used for the deposition of ultrathin metallic layers of platinum by the electron beam induced deposition process.
Uses	(Trimethyl)methylcyclopentadienylplatinum(IV) was used for the deposition of ultrathin metallic layers of platinum by electron beam induced deposition, atomic sputtering.These deposits find application in microelectronics, catalysis, photonics and chemical sensing.
General Description	Trimethyl(methyl cyclopentadienyl)platinum(IV) ( MeCpPtMe₃) is a commonly used organometallic precursor for platinum.

(Trimethyl)methylcyclopentadienylplatinum(IV) Preparation Products And Raw materials

Raw materials

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